Description
The Lam Research 98008RFRSA10P1 is a specialized high-frequency radio frequency (RF) subsystem and power controller engineered for Lam semiconductor processing equipment, including advanced plasma etch and thin-film deposition tools. Designed to regulate RF power delivery, impedance matching, and plasma density with extreme precision, this module ensures high wafer-to-wafer repeatability and tight critical dimension (CD) control in sub-micron fabrication lines.
Featuring low-noise analog circuitry, high-speed digital communication interfaces, and robust electrical isolation, the 98008RFRSA10P1 maintains stable plasma ignition and suppression under continuous high-power and thermal cycling conditions. It serves as an essential hardware replacement or upgrade component for semiconductor manufacturing facilities aiming to minimize chamber downtime and maximize operational yield.
Product Parameters & Datasheet
- 🔹 Brand: Lam Research
- 🔹 Model: 98008RFRSA10P1
- 🔹 Series: Semiconductor RF Subsystem and Tool Control Series
- 🔹 Product Name: RF Generator / Subsystem Interface Controller Board
- 🔹 Country of Origin: United States / Global Manufacturing Hub
- 🔹 Product Condition: Semiconductor Grade Automation Component (New / Factory Certified Refurbished)
- 🔹 Dimensions: Standard Lam Modular Rack / Slot-Mount Enclosure Form Factor
- 🔹 Weight: Approx. 0.8 kg
- 🔹 Origin Region: North American Manufacturing Standard
- 🔹 Power Rating: Standard Internal Tool Bus & DC Power Architecture
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One year warranty, special discount after sale
The company focuses on DCS, PLC, robot, large servo four systems
The main products are all kinds of module/card, controller, touch screen, servo drive
The company's advantages: the supply of imported original products, professional production of accessories
Fast delivery time, complete supply, The seller has more than $1526000 worth of industrial control products inventory
We Can transport to the world！！！
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[service contact information]
Purchase and consultation hotline: +8613365909307 (Whatsapp/ Wechat)
E-mail: dcsplcsales@gmail.com
Contact Person: Simon
① 24-hour email reply (12 hours);
② For shipment to countries outside Asia, please contact the seller.
Main brands include: ABB, Bailey, GE, FOXBORO, Invensys TRICONEX, Bentley BENTLY, A-B Rockwell, EMERSON EMERSON, B&R, MOTOROLA, FUANC, REXROTH, KUKA, HONEYWELL, NI, DEIF, Yokogawa, WOODWARD WOODWARD, Ryan, SCHNEIDER SCHNEIDER, Yaskawa, MOOG, EPRO, PROSOFT and other major brands
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E-mail:dcsplcsales@gmail.com
Wechat:+86 13365909307
Phone:+86 13365909307