Zygo | ZMI-4104 | Laser Interferometer Displacement Measurement Board

The Zygo ZMI-4104 (also designated as the ZMI-4104C) Laser Interferometer Displacement Measurement Board is an advanced high-precision metrology and positioning control component engineered specifically for Zygo ZMI series nano-position sensor systems. Designed for demanding applications such as semiconductor lithography wafer stages, precision optical metrology, and high-speed motion platforms, this board processes optical signals driven by ZMI laser sources to deliver exceptional sub-nanometer resolution and real-time displacement tracking. It acts as a vital measurement and feedback bridge, empowering precision engineers and system integrators with unmatched accuracy, high-speed data acquisition, and robust multi-axis synchronization across complex advanced manufacturing architectures.

The following parameters outline the technical blueprint and physical characteristics of the measurement board, adhering to rigorous industrial metrology and manufacturing standards:

• 🔹 Brand: Zygo
• 🔹 Model: ZMI-4104 (ZMI-4104C / Part No. 8020-0700-01)
• 🔹 Series: ZMI Displacement Measuring Interferometer Platform
• 🔹 Product Name: Laser Interferometer Measurement Board / PCB Card
• 🔹 Form Factor: Standard VME64x Bus Rack Slot Format
• 🔹 Measurement Resolution: Sub-nanometer resolution (<0.1 nm capability)
• 🔹 Supported Axes: Multi-axis synchronization support (expandable configuration)
• 🔹 Laser Source Compatibility: ZMI Series Stabilized HeNe Laser Systems
• 🔹 Country of Origin: United States / European Union
• 🔹 Condition Status: Brand New / Factory Sealed / Refurbished Options Available

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